Surface grating VCSEL-integrated amplifier/beam scanner with high power and single mode operation

Abstract We propose and demonstrate a novel surface-grating vertical cavity surface emitting laser (VCSEL)-integrated amplifier/beam scanner. When the of VCSEL section is periodically etched, single slow-light mode which travels laterally into amplifier selected due to wavelength selectivity grating. The coupled slow light can be amplified with pumping above threshold. far field angle continuously tuned through changing current at VCSEL. fabricated integrated device 400 μ m long 1 mm section, realizing in coupling power over 7 mW high output 500 under pulsed operations amplifier. continuous fan beam steering 1.5° diffraction-limited narrow divergence 0.06° are also achieved. extending length 2 mm. A W achieved, record operation for single-mode VCSELs. With performance both good quality, our new shows great potential used as source LiDAR other sensing applications.